TECHNICAL UNIVERSITY OF GABROVO
Journal of the Technical University of Gabrovo
 

VOLUME 63 (11/2021)


TITLE
CRYSTALLOGRAPHY OF COOPER OXIDE COATINGS DEPOSITED ON Si SUBSTRATE BY REACTIVE MAGNETRON SPUTTERING

AUTHOR(S)
M. Ormanova, G. Kotlarski, D. Dechev, S. Valkov, N. Ivanov, P. Petrov

ABSTRACT

DOI

PAGES
81-

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CRYSTALLOGRAPHY OF COOPER OXIDE COATINGS DEPOSITED ON Si SUBSTRATE BY REACTIVE MAGNETRON SPUTTERING

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